CMP解决方案
提供200mm和300mm整体CMP设备等产品
设备结构布局
适用于先进的逻辑和存储器芯片制造,为整个集成电路加工行业提供高效率的CMP解决方案。
系统新型的自动控制技术
智能化实时控制,人性化界面,兼容SEMI标准的高性能自动化软件。采用新型软件架构,提高了设备运行效率,保证晶圆平坦化过程的可靠性和稳定性。
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