SIZONE provides integrated equipment solutions with the 200mm and 300mm CMP equipment.
Equipment Structural Layout
Designed to meet the most advanced logic and memory chip manufacturing standards, SIZONE provides the most efficient CMP solution for the entire IC processing industry.
New Systematic Automation Control Technology
Smart Real-time Control, User Friendly Interface, and High-performance Automation Software with SEMI standards, the new software structure increases the equipment’s operational efficiency and ensures the reliability and stability of the wafer’s planarization process.